The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.
Caronti, A., Caliano, G., Savoia, A.S., Gatta, P., Pappalardo, M. (2006)Microfabricated Capacitive Ultrasonic Transducer for High Frequency Applications. . Brevetto No. US7477572.
Microfabricated Capacitive Ultrasonic Transducer for High Frequency Applications
CALIANO, Giosue';SAVOIA, ALESSANDRO STUART;
2006-01-01
Abstract
The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.File in questo prodotto:
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