The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.
Caronti, A., Caliano, G., Savoia, A.S., Gatta, P., Pappalardo, M. (2006)Microfabricated Capacitive Ultrasonic Transducer for High Frequency Applications. Brevetto No. US7477572.
Microfabricated Capacitive Ultrasonic Transducer for High Frequency Applications
CALIANO, Giosue';SAVOIA, ALESSANDRO STUART;
2006-01-01
Abstract
The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.File in questo prodotto:
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