A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.

Savoia, A.S., Giusti, D., Ferrera, M., Quaglia, F. (2021)Micromechanical device for transducing acoustic waves in a propagation medium. . Brevetto No. US20220169497A1.

Micromechanical device for transducing acoustic waves in a propagation medium

Alessandro Stuart Savoia;
2021-01-01

Abstract

A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.
2021
Savoia, A.S., Giusti, D., Ferrera, M., Quaglia, F. (2021)Micromechanical device for transducing acoustic waves in a propagation medium. . Brevetto No. US20220169497A1.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/471408
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