We report on a novel solid-state spectrum analyzer in the near infrared. The device is an array of six photodetectors based on polycrystalline germanium film evaporated on a silicon substrate and each element is a wavelength-selective detector. We describe the fabrication and characterization of such device and we demonstrate its capability both as a wavelengthmeter for quasi-monochromatic light beams and as a spectrum analyzer. (C) 2001 Elsevier Science Ltd. All rights reserved.
Colace, L., Masini, G., Galluzzi, F., Assanto, G. (2000). A solid-state near infrared spectrum analyzer based on polycrystalline Ge on Si. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 3(5-6), 545-549 [10.1016/S1369-8001(00)00082-2].
A solid-state near infrared spectrum analyzer based on polycrystalline Ge on Si
COLACE, Lorenzo;ASSANTO, GAETANO
2000-01-01
Abstract
We report on a novel solid-state spectrum analyzer in the near infrared. The device is an array of six photodetectors based on polycrystalline germanium film evaporated on a silicon substrate and each element is a wavelength-selective detector. We describe the fabrication and characterization of such device and we demonstrate its capability both as a wavelengthmeter for quasi-monochromatic light beams and as a spectrum analyzer. (C) 2001 Elsevier Science Ltd. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.