The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range. (c) 2005 Elsevier B.V. All rights reserved.

Caliano G, Savoia A, Caronti A, Foglietti V, Cianci E, & Pappalardo M (2005). Capacitive micromachined ultrasonic transducer with an open-cells structure. SENSORS AND ACTUATORS. A, PHYSICAL, 121(2), 382-387 [10.1016/j.sna.2005.03.045].

Capacitive micromachined ultrasonic transducer with an open-cells structure

CALIANO, Giosue';
2005

Abstract

The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range. (c) 2005 Elsevier B.V. All rights reserved.
Caliano G, Savoia A, Caronti A, Foglietti V, Cianci E, & Pappalardo M (2005). Capacitive micromachined ultrasonic transducer with an open-cells structure. SENSORS AND ACTUATORS. A, PHYSICAL, 121(2), 382-387 [10.1016/j.sna.2005.03.045].
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11590/121335
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