The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range. (c) 2005 Elsevier B.V. All rights reserved.
Caliano, G., Savoia, A., Caronti, A., Foglietti, V., Cianci, E., Pappalardo, M. (2005). Capacitive micromachined ultrasonic transducer with an open-cells structure. SENSORS AND ACTUATORS. A, PHYSICAL, 121(2), 382-387 [10.1016/j.sna.2005.03.045].
Capacitive micromachined ultrasonic transducer with an open-cells structure
2005-01-01
Abstract
The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range. (c) 2005 Elsevier B.V. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
