The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range.
Caliano, G., Savoia, A., Caronti, A., Foglietti, V., Cianci, E., Pappalardo, M. (2005). Capacitive micromachined ultrasonic transducer with an open-cells structure. SENSORS AND ACTUATORS. A, PHYSICAL, 121(2), 382-387 [10.1016/j.sna.2005.03.045].
Capacitive micromachined ultrasonic transducer with an open-cells structure
CALIANO, Giosue';PAPPALARDO, Massimo
2005-01-01
Abstract
The capacitive micromachined ultrasonic transducer (cMUT) has proved to be a viable alternative to the classical piezoelectric transducer in many practical applications like medical diagnostic and non-destructive testing. A cMUT consists of an array of closed electrostatic microcells obtained by surface micromachining a silicon substrate. In this paper, we present an electrostatic transducer made with an open-cell structure which shows many potential advantages over the closed-cell structure of the cMUT. Finite element model predictions together with experimental evidence demonstrate the viability of this approach to the electro-acoustic energy conversion in the MHz range.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
