Hydrogenated carbon-silicon alloys with carbon fraction X(C) between 0.2 and 0.8 have been deposited and characterized. For X(C) less-than-or-equal-to 0.5 it is shown that Si/SiC phases whose electronic properties can be optimized by using an H-2 dilution higher than 90% and a substrate temperature T(d) almost-equal-to 300-degrees-C are preferentially deposited. For X(C) > 0.5 the deposited material contains polymer-like phases which are responsible for high optical transparency and poor electronic properties.

Decesare, G., Galluzzi, F., Guattari, G., Leo, G., Vincenzoni, R., Bemporad, E. (1993). STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF WIDE-BAND GAP AMORPHOUS-CARBON SILICON ALLOYS. DIAMOND AND RELATED MATERIALS, 2(5-7), 773-777 [10.1016/0925-9635(93)90221-M].

STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF WIDE-BAND GAP AMORPHOUS-CARBON SILICON ALLOYS

BEMPORAD, Edoardo
1993-01-01

Abstract

Hydrogenated carbon-silicon alloys with carbon fraction X(C) between 0.2 and 0.8 have been deposited and characterized. For X(C) less-than-or-equal-to 0.5 it is shown that Si/SiC phases whose electronic properties can be optimized by using an H-2 dilution higher than 90% and a substrate temperature T(d) almost-equal-to 300-degrees-C are preferentially deposited. For X(C) > 0.5 the deposited material contains polymer-like phases which are responsible for high optical transparency and poor electronic properties.
1993
Decesare, G., Galluzzi, F., Guattari, G., Leo, G., Vincenzoni, R., Bemporad, E. (1993). STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF WIDE-BAND GAP AMORPHOUS-CARBON SILICON ALLOYS. DIAMOND AND RELATED MATERIALS, 2(5-7), 773-777 [10.1016/0925-9635(93)90221-M].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/131515
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