Fingerprint imaging using ultrasound has been investigated for several years and has shown to be a valid alternative to optical scanners. Capacitive micro-machined ultrasound transducers (cMUT) is an emerging MEMS technology that can be proﬁtably exploited in biometric applications, like ﬁngerprint or palm print.In this work a FEM model of a cMUT is proposed and used to design a 192-element array with a frequency band centered at 12.5 MHz. A cMUT array was manufactured by means of a proprietary fabrication process and an ultrasound probe was assembled and experimentally characterized. Comparison between simulation and experimental results has shown a quite good agreement. The cMUT probe was operated at a frequency of 12 MHz and used to produce images of ﬁngerprints, the quality of which was quite satisfactory.
Lamberti, N., Caliano, G., Iula, A., Savoia, A. (2011). A High Frequency cMUT probe for Ultrasound Imaging of Fingerprints. SENSORS AND ACTUATORS. A, PHYSICAL, 172(2), 561-569 [10.1016/j.sna.2011.09.038].