We report on near-infrared waveguide photodetectors realized in germanium evaporated at low temperature on silicon-on-insulator optical chips. We discuss the fabrication and integration and show experimental results in terms of dark current, responsivity and signal to noise ratio. (C) 2008 Elsevier B.V. All rights reserved.
Sorianello, V., Balbi, M., Colace, L., Assanto, G., Socci, L., Bolla, L., et al. (2009). Guided-wave photodetectors in germanium on SOI optical chips. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 41(6), 1090-1093 [10.1016/j.physe.2008.08.038].