Operational characterization of CSFH MEMS Technology based hinges

Abstract Progress in MEMS Technology continuously stimulates new developments in the mechanical structure of micro systems, such as, for example, the new concept so-called CSFH (Conjugate Surfaces Flexural Hinge), which makes it possible, simultaneously, to minimize the internal stresses and to increase motion range and robustness. Such hinge may be actuated by means of a rotary comb-drive, provided that a proper set of simulations and tests are capable to assess its feasibility. In this paper, a CSFH has been analyzed with both theoretical and Finite Element (FEM) methods, in order to obtain the relation between voltage and generated torque. The FEM model, realized with an APDL code (ANSYS Parametric Design Language), considers also the fringe effect on the comb drive finger. Electromechanical couple field analysis is performed by means of both Direct and Load Transfer Methods. Experimental tests have been also performed on a CSFH embedded in a MEMS prototype, which has been fabricated starting from a SOI wafer and using D-RIE(Deep Reactive Ion Etching). Results showed that CSFH performs better than linear fexure hinges in terms of larger rotations and less stress for given applied voltage.