We show that SiGe islands are transformed into nanoholes and rings solely by annealing treatments and without Si capping. Rings are produced by a rapid flash heating at temperatures higher than the melting point of Ge, whereas nanoholes are produced by several minutes of annealing. The rings are markedly rich in Si with respect to the pristine islands, suggesting that the evolution path from islands to rings is driven by the selective dissolution of Ge occurring at high temperatures. © 2013 Elsevier B.V. All rights reserved.
Persichetti, L., Capasso, A., Sgarlata, A., Quatela, A., Kaciulis, S., Mezzi, A., et al. (2013). Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing. APPLIED SURFACE SCIENCE, 283, 813-819 [10.1016/j.apsusc.2013.07.024].
Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing
Persichetti L.
;MOTTA, NUNZIO;Balzarotti A.
2013-01-01
Abstract
We show that SiGe islands are transformed into nanoholes and rings solely by annealing treatments and without Si capping. Rings are produced by a rapid flash heating at temperatures higher than the melting point of Ge, whereas nanoholes are produced by several minutes of annealing. The rings are markedly rich in Si with respect to the pristine islands, suggesting that the evolution path from islands to rings is driven by the selective dissolution of Ge occurring at high temperatures. © 2013 Elsevier B.V. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
