Semiconductor epitaxial nanostructures have been recently proposed as the key building blocks of many innovative applications in materials science and technology. To bring their tremendous potential to fruition, a fine control of nanostructure size and placement is necessary. We present a detailed investigation of the self-ordering process in the prototype case of Ge/Si heteroepitaxy. Starting from a bottom-up strategy (step-bunching instabilities), our analysis moves to lithographic techniques (scanning tunneling lithography, nanomechanical stamping, focused ion beam patterning) with the aim of developing a hybrid approach in which the exogenous intervention is specifically designed to suit and harness the natural self-organization dynamics of the system. Copyright © 2011 American Scientific Publishers All rights reserved.
Sgarlata, A., Persichetti, L., Capasso, A., Fanfoni, M., Motta, N., Balzarotti, A. (2011). Driving Ge island ordering on nanostructured Si surfaces. NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 3(6), 841-849 [10.1166/nnl.2011.1256].
Driving Ge island ordering on nanostructured Si surfaces
Persichetti L.;Motta N.;Balzarotti A.
2011-01-01
Abstract
Semiconductor epitaxial nanostructures have been recently proposed as the key building blocks of many innovative applications in materials science and technology. To bring their tremendous potential to fruition, a fine control of nanostructure size and placement is necessary. We present a detailed investigation of the self-ordering process in the prototype case of Ge/Si heteroepitaxy. Starting from a bottom-up strategy (step-bunching instabilities), our analysis moves to lithographic techniques (scanning tunneling lithography, nanomechanical stamping, focused ion beam patterning) with the aim of developing a hybrid approach in which the exogenous intervention is specifically designed to suit and harness the natural self-organization dynamics of the system. Copyright © 2011 American Scientific Publishers All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
