Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

Vurchio, F., Ursi, P., Orsini, F., Scorza, A., Crescenzi, R., Sciuto, S.A., et al. (2019). Toward operations in a surgical scenario: Characterization of a microgripper via light microscopy approach. APPLIED SCIENCES, 9(9), 1901 [10.3390/app9091901].

Toward operations in a surgical scenario: Characterization of a microgripper via light microscopy approach

Vurchio F.
Investigation
;
Orsini F.
Visualization
;
Scorza A.
Data Curation
;
Sciuto S. A.
Supervision
;
Belfiore N. P.
Supervision
2019-01-01

Abstract

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.
2019
Vurchio, F., Ursi, P., Orsini, F., Scorza, A., Crescenzi, R., Sciuto, S.A., et al. (2019). Toward operations in a surgical scenario: Characterization of a microgripper via light microscopy approach. APPLIED SCIENCES, 9(9), 1901 [10.3390/app9091901].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/355040
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