This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) μm2, an active clamping area of (2 × 4) μm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.
Buzzin, A., Cupo, S., Giovine, E., de Cesare, G., Belfiore, N.P. (2020). Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication. MICROMACHINES, 11(12), 1087 [10.3390/mi11121087].
Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication
Belfiore, Nicola Pio
2020-01-01
Abstract
This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) μm2, an active clamping area of (2 × 4) μm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
