This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in-SEM experiment is performed and the experimental results are interpreted through the theoretical models.

Verotti, M., Crescenzi, R., Balucani, M., & Belfiore, N.P. (2015). MEMS-based conjugate surfaces flexure hinge. JOURNAL OF MECHANICAL DESIGN, 137(1) [10.1115/1.4028791].

MEMS-based conjugate surfaces flexure hinge

Belfiore N. P.
2015

Abstract

This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in-SEM experiment is performed and the experimental results are interpreted through the theoretical models.
Verotti, M., Crescenzi, R., Balucani, M., & Belfiore, N.P. (2015). MEMS-based conjugate surfaces flexure hinge. JOURNAL OF MECHANICAL DESIGN, 137(1) [10.1115/1.4028791].
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11590/383777
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