In this paper we demonstrate atomic-scale lithography on hydrogen terminated Ge(001). The lithographic patterns were obtained by selectively desorbing hydrogen atoms from a H resist layer adsorbed on a clean, atomically flat Ge(001) surface with a scanning tunneling microscope tip operating in ultra-high vacuum. The influence of the tip-to-sample bias on the lithographic process have been investigated. Lithographic patterns with feature-sizes from 200 to 1.8 nm have been achieved by varying the tip-to-sample bias. These results open up the possibility of a scanning-probe lithography approach to the fabrication of future atomic-scale devices in germanium.

Scappucci, G., Capellini, G., Lee, W., Simmons, M.y. (2009). Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy. NANOTECHNOLOGY, 20(49) [10.1088/0957-4484/20/49/495302].

Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy

CAPELLINI, GIOVANNI;
2009

Abstract

In this paper we demonstrate atomic-scale lithography on hydrogen terminated Ge(001). The lithographic patterns were obtained by selectively desorbing hydrogen atoms from a H resist layer adsorbed on a clean, atomically flat Ge(001) surface with a scanning tunneling microscope tip operating in ultra-high vacuum. The influence of the tip-to-sample bias on the lithographic process have been investigated. Lithographic patterns with feature-sizes from 200 to 1.8 nm have been achieved by varying the tip-to-sample bias. These results open up the possibility of a scanning-probe lithography approach to the fabrication of future atomic-scale devices in germanium.
Scappucci, G., Capellini, G., Lee, W., Simmons, M.y. (2009). Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy. NANOTECHNOLOGY, 20(49) [10.1088/0957-4484/20/49/495302].
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/155393
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 24
  • ???jsp.display-item.citation.isi??? 22
social impact