Capacitive micromachined ultrasonic transducers (cMUTs) are micro-electromechanical devices (MEMS) fabricated using silicon micromachining techniques. In the past decade, their use has proved to be attractive mainly in the field of medical ultrasound imaging as active elements in ultrasound probes. The interest of this novel technology relies in its full compatibility with standard integrated circuit technology that makes it possible to integrate, on the same chip, the transducers and the electronics, thus enabling the realization of extremely compact and high-performance devices.

Savoia AS, Caliano G, & Pappalardo M (2011). Ultrasound Probes Fabricated on Silicon for Medical Imaging. In Nanotechitaly 2011 International Conference (pp.349-350).

Ultrasound Probes Fabricated on Silicon for Medical Imaging

SAVOIA, ALESSANDRO STUART;CALIANO, Giosue';
2011

Abstract

Capacitive micromachined ultrasonic transducers (cMUTs) are micro-electromechanical devices (MEMS) fabricated using silicon micromachining techniques. In the past decade, their use has proved to be attractive mainly in the field of medical ultrasound imaging as active elements in ultrasound probes. The interest of this novel technology relies in its full compatibility with standard integrated circuit technology that makes it possible to integrate, on the same chip, the transducers and the electronics, thus enabling the realization of extremely compact and high-performance devices.
Savoia AS, Caliano G, & Pappalardo M (2011). Ultrasound Probes Fabricated on Silicon for Medical Imaging. In Nanotechitaly 2011 International Conference (pp.349-350).
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/174742
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact