Ultrasonic transducers are generally based on the piezoelectric effect and they are used in a variety of applications (medicalimaging, NDE, ranging). Some of the main reasons for choosing an alternative technology, based on electrostatic effect, arelow impedance mismatch with air and in water, low energy density, high efficiency, low costs, good integration with controlelectronics.Capacitive ultrasonic transducer consists in a parallel plates capacitor (like a condenser microphone) with a fixed electrodeand a free one (membrane). A cMUT (capacitive Micromachined Ultrasonic Transducer) consists of an array of capacitiveultrasonic transducer with metallized membranes suspended on silicon bulk. The membrane thickness is 0.4 mm. Tests ofthese transducers (@ 2.5 MHz) fabricated in our laboratories are in progress.
Caliano, G., F., G., V., F., E., C., A., C., A., I. (2000). Development of silicon ultrasonic transducer using micromachining. In Micromachined Devices and Components VI (pp.244-252) [10.1117/12.395636].
Development of silicon ultrasonic transducer using micromachining
CALIANO, Giosue';
2000-01-01
Abstract
Ultrasonic transducers are generally based on the piezoelectric effect and they are used in a variety of applications (medicalimaging, NDE, ranging). Some of the main reasons for choosing an alternative technology, based on electrostatic effect, arelow impedance mismatch with air and in water, low energy density, high efficiency, low costs, good integration with controlelectronics.Capacitive ultrasonic transducer consists in a parallel plates capacitor (like a condenser microphone) with a fixed electrodeand a free one (membrane). A cMUT (capacitive Micromachined Ultrasonic Transducer) consists of an array of capacitiveultrasonic transducer with metallized membranes suspended on silicon bulk. The membrane thickness is 0.4 mm. Tests ofthese transducers (@ 2.5 MHz) fabricated in our laboratories are in progress.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
