As illustrated for single cases, the residual stress analysis based on FIB milling and DIC analysis has a large potential to determine residual stresses in thin layer systems. For the introduction of the FIB-DIC approach as industrial method, measurement automation with time saving fast measurement routines, cost efficient and validated measurement procedures are a basic prerequisite. A best practice report under preparation (in [6]) will give the industrial user guidance to implement and use the FIBDIC method with own equipment. Besides instructions to get started fast, a wide experience in applying the FIB-DIC method will be presented. It allows preparation of suitable measurement routines for customer specific problems, avoiding elaborate trial-and-error tests.

Auerswald, E., Vogel, D., Sebastiani, M., Lord, J., Rzepka, S. (2016). Best practice approaches for stress measurements on thin layer stacks. In Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 (pp.368-371). Verlag Wissenschaftliche Scripten.

Best practice approaches for stress measurements on thin layer stacks

SEBASTIANI, MARCO;
2016-01-01

Abstract

As illustrated for single cases, the residual stress analysis based on FIB milling and DIC analysis has a large potential to determine residual stresses in thin layer systems. For the introduction of the FIB-DIC approach as industrial method, measurement automation with time saving fast measurement routines, cost efficient and validated measurement procedures are a basic prerequisite. A best practice report under preparation (in [6]) will give the industrial user guidance to implement and use the FIBDIC method with own equipment. Besides instructions to get started fast, a wide experience in applying the FIB-DIC method will be presented. It allows preparation of suitable measurement routines for customer specific problems, avoiding elaborate trial-and-error tests.
9783957350404
9783957350404
Auerswald, E., Vogel, D., Sebastiani, M., Lord, J., Rzepka, S. (2016). Best practice approaches for stress measurements on thin layer stacks. In Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 (pp.368-371). Verlag Wissenschaftliche Scripten.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/303920
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