As illustrated for single cases, the residual stress analysis based on FIB milling and DIC analysis has a large potential to determine residual stresses in thin layer systems. For the introduction of the FIB-DIC approach as industrial method, measurement automation with time saving fast measurement routines, cost efficient and validated measurement procedures are a basic prerequisite. A best practice report under preparation (in ) will give the industrial user guidance to implement and use the FIBDIC method with own equipment. Besides instructions to get started fast, a wide experience in applying the FIB-DIC method will be presented. It allows preparation of suitable measurement routines for customer specific problems, avoiding elaborate trial-and-error tests.
Auerswald, E., Vogel, D., Sebastiani, M., Lord, J., Rzepka, S. (2016). Best practice approaches for stress measurements on thin layer stacks. In Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 (pp.368-371). Verlag Wissenschaftliche Scripten.