A position sensitive detector (PSD) for UV light has been realized on a high quality diamond substrate. The layouts of the contact structure and of the interfacing circuitry have been optimised to allow the use under excimer laser light. The simplicity of the structure mainly overcomes all the limitations of the diamond technology, but also guarantees high reliability of the detector. The linearity of the sensor transcharacteristic and the dependency of the output signal on the beam intensity and size were studied
Mazzeo, G., Salvatori, S., Ralchenko, V., Conte, G. (2004). Design and test of deep-UV position sensitive detectors. In Proceedings of IEEE Sensors 2004 [10.1109/ICSENS.2004.1426486].
Design and test of deep-UV position sensitive detectors
S. Salvatori
Membro del Collaboration Group
;V. RalchenkoMembro del Collaboration Group
;G. ConteSupervision
2004-01-01
Abstract
A position sensitive detector (PSD) for UV light has been realized on a high quality diamond substrate. The layouts of the contact structure and of the interfacing circuitry have been optimised to allow the use under excimer laser light. The simplicity of the structure mainly overcomes all the limitations of the diamond technology, but also guarantees high reliability of the detector. The linearity of the sensor transcharacteristic and the dependency of the output signal on the beam intensity and size were studiedI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
