Microgrippers are MEMS technology-based devices, able to handle objects of dimensions similar to those of cells (i.e. between 10 and 100 μm); these particular devices, are able to move and grasp object positioned between their grippers when a voltage is applied. In recent years, the demand for low-invasive, reliable, low-energy, small-sized devices with high performance repeatability is growing, and microgrippers seem to satisfy these expectations and are very promising in biomedical applications. However, the contributions relating to the characterization of such devices are still lacking, both from the metrological and performance point of view. In this study a methodology to characterize a microgripper prototype for biomedical applications is proposed, that includes the analysis of images through an in-house software developed ad hoc, acquired through a light trinocular microscope and an embedded camera. In particular, the Comb-Drive angular displacement, gripper rotation and the gripper displacement due to applied voltage have been measured. The results gave an estimate of the total uncertainty of 0.021°, 0.09° and 4 μm for Comb-Drive angular displacement, gripper rotation and gripper displacement respectively, referred to the whole range of the applied voltage.
Vurchio, F., Orsini, F., Scorza, A., Sciuto, S.A. (2019). Functional characterization of MEMS Microgripper prototype for biomedical application: Preliminary results. In Medical Measurements and Applications, MeMeA 2019 - Symposium Proceedings (pp.1-6). Institute of Electrical and Electronics Engineers Inc. [10.1109/MeMeA.2019.8802178].
Functional characterization of MEMS Microgripper prototype for biomedical application: Preliminary results
Vurchio F.Investigation
;Orsini F.Visualization
;Scorza A.
Conceptualization
;Sciuto S. A.Supervision
2019-01-01
Abstract
Microgrippers are MEMS technology-based devices, able to handle objects of dimensions similar to those of cells (i.e. between 10 and 100 μm); these particular devices, are able to move and grasp object positioned between their grippers when a voltage is applied. In recent years, the demand for low-invasive, reliable, low-energy, small-sized devices with high performance repeatability is growing, and microgrippers seem to satisfy these expectations and are very promising in biomedical applications. However, the contributions relating to the characterization of such devices are still lacking, both from the metrological and performance point of view. In this study a methodology to characterize a microgripper prototype for biomedical applications is proposed, that includes the analysis of images through an in-house software developed ad hoc, acquired through a light trinocular microscope and an embedded camera. In particular, the Comb-Drive angular displacement, gripper rotation and the gripper displacement due to applied voltage have been measured. The results gave an estimate of the total uncertainty of 0.021°, 0.09° and 4 μm for Comb-Drive angular displacement, gripper rotation and gripper displacement respectively, referred to the whole range of the applied voltage.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
