This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.
Buzzin, A., Veroli, A., De Cesare, G., Giovine, E., Verotti, M., Belfiore, N.P. (2019). A new NEMS Based Linear-to-Rotary Displacement-Capacity Transducer. In Proceedings - 2019 8th International Workshop on Advances in Sensors and Interfaces, IWASI 2019 (pp.201-204). Institute of Electrical and Electronics Engineers Inc. [10.1109/IWASI.2019.8791387].
A new NEMS Based Linear-to-Rotary Displacement-Capacity Transducer
Belfiore N. P.
2019-01-01
Abstract
This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
