This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under study, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.

Belfiore, N.P., Bagolini, A., Rossi, A., Bocchetta, G., Vurchio, F., Crescenzi, R., et al. (2021). Design, fabrication, testing and simulation of a rotary double comb drives actuated microgripper. MICROMACHINES, 12(10), 1263 [10.3390/mi12101263].

Design, fabrication, testing and simulation of a rotary double comb drives actuated microgripper

Belfiore N. P.;Rossi A.;Bocchetta G.
Investigation
;
Vurchio F.
Investigation
;
Scorza A.
Supervision
;
Sciuto S. A.
Supervision
2021-01-01

Abstract

This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. In fact, the adoption of multiple CSFHs gives rise to the possibility of embedding quite a complex mechanical structure and, therefore, increasing the number of design parameters. For the case under study, a double four-bar linkage in a mirroring configuration was adopted. The presented microgripper has been fabricated by using a hard metal mask on a Silicon-on-Insulator (SOI) wafer, subject to DRIE (Deep Reactive Ion Etching) process, with a vapor releasing final stage. Some prototypes have been obtained and then tested in a lab. Finally, the experimental results have been used in order to assess simulation tools that can be used to minimize the amount of expensive equipment in operational environments.
Belfiore, N.P., Bagolini, A., Rossi, A., Bocchetta, G., Vurchio, F., Crescenzi, R., et al. (2021). Design, fabrication, testing and simulation of a rotary double comb drives actuated microgripper. MICROMACHINES, 12(10), 1263 [10.3390/mi12101263].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/395068
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