Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a test case compliant electrostatic micro or nano actuator that is under development with two preferred micro fabrication methods, namely, thick SOI and thin amorphous silicon. A series of numerical trials on materials strength, electro-mechanical characteristics, sensitivity and overall actuation performance have been carried out at different grades of down-scaling and of aspect ratio. This gave rise to new design charts that we propose here as a predictive and friendly guide to select the most appropriate micro fabrication method.
Buzzin, A., Rossi, A., Giovine, E., de Cesare, G., & Belfiore, N.P. (2022). Downsizing Effects on Micro and Nano Comb Drives. ACTUATORS, 11(3), 71 [10.3390/act11030071].
Titolo: | Downsizing Effects on Micro and Nano Comb Drives | |
Autori: | BELFIORE, NICOLA PIO (Corresponding) | |
Data di pubblicazione: | 2022 | |
Rivista: | ||
Citazione: | Buzzin, A., Rossi, A., Giovine, E., de Cesare, G., & Belfiore, N.P. (2022). Downsizing Effects on Micro and Nano Comb Drives. ACTUATORS, 11(3), 71 [10.3390/act11030071]. | |
Handle: | http://hdl.handle.net/11590/401685 | |
Appare nelle tipologie: | 1.1 Articolo in rivista |
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