Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a test case compliant electrostatic micro or nano actuator that is under development with two preferred micro fabrication methods, namely, thick SOI and thin amorphous silicon. A series of numerical trials on materials strength, electro-mechanical characteristics, sensitivity and overall actuation performance have been carried out at different grades of down-scaling and of aspect ratio. This gave rise to new design charts that we propose here as a predictive and friendly guide to select the most appropriate micro fabrication method.

Buzzin, A., Rossi, A., Giovine, E., de Cesare, G., Belfiore, N.P. (2022). Downsizing Effects on Micro and Nano Comb Drives. ACTUATORS, 11(3), 71 [10.3390/act11030071].

Downsizing Effects on Micro and Nano Comb Drives

Rossi A.;Belfiore N. P.
2022-01-01

Abstract

Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a test case compliant electrostatic micro or nano actuator that is under development with two preferred micro fabrication methods, namely, thick SOI and thin amorphous silicon. A series of numerical trials on materials strength, electro-mechanical characteristics, sensitivity and overall actuation performance have been carried out at different grades of down-scaling and of aspect ratio. This gave rise to new design charts that we propose here as a predictive and friendly guide to select the most appropriate micro fabrication method.
Buzzin, A., Rossi, A., Giovine, E., de Cesare, G., Belfiore, N.P. (2022). Downsizing Effects on Micro and Nano Comb Drives. ACTUATORS, 11(3), 71 [10.3390/act11030071].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/401685
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