The development of a CMOS manufactured THz sensing platform could enable the integration of state-of-the-art sensing principles with the mixed signal electronics ecosystem in small footprint, low-cost devices. To this aim, in this work we demonstrate a label-free protein sensing platform using highly doped germanium plasmonic antennas realized on Si and SOI substrates and operating in the THz range of the electromagnetic spectrum. The antenna response to different concentrations of BSA shows in both cases a linear response with saturation above 20 mg/mL. Ge antennas on SOI substrates feature a two-fold sensitivity as compared to conventional Si substrates, reaching a value of 6 GHz/(mg/mL), which is four-fold what reported using metal-based metamaterials. We believe that this result could pave the way to a low-cost lab-on-a-chip biosensing platform.

Hardt, E., Chavarin, C.A., Gruessing, S., Flesch, J., Skibitzki, O., Spirito, D., et al. (2022). Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes. OPTICS EXPRESS, 30(22), 40265-40276 [10.1364/OE.469496].

Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes

Vita, Gian Marco
Formal Analysis
;
Simone, Giovanna De
Formal Analysis
;
Masi, Alessandra di
Formal Analysis
;
Capellini, Giovanni
Writing – Original Draft Preparation
2022

Abstract

The development of a CMOS manufactured THz sensing platform could enable the integration of state-of-the-art sensing principles with the mixed signal electronics ecosystem in small footprint, low-cost devices. To this aim, in this work we demonstrate a label-free protein sensing platform using highly doped germanium plasmonic antennas realized on Si and SOI substrates and operating in the THz range of the electromagnetic spectrum. The antenna response to different concentrations of BSA shows in both cases a linear response with saturation above 20 mg/mL. Ge antennas on SOI substrates feature a two-fold sensitivity as compared to conventional Si substrates, reaching a value of 6 GHz/(mg/mL), which is four-fold what reported using metal-based metamaterials. We believe that this result could pave the way to a low-cost lab-on-a-chip biosensing platform.
Hardt, E., Chavarin, C.A., Gruessing, S., Flesch, J., Skibitzki, O., Spirito, D., et al. (2022). Quantitative protein sensing with germanium THz-antennas manufactured using CMOS processes. OPTICS EXPRESS, 30(22), 40265-40276 [10.1364/OE.469496].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/422068
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