Ultrasonic ranging with piezoelectric micromachined ultrasonic transducers (pMUTs) can be used in applications such as robotic systems and industrial machinery for precise distance measurements. This work presents a technique of operating pMUTs below the resonance frequency to obtain a wide bandwidth for high resolution time-of-flight (ToF) ranging. Digital signal processing was performed to remove the residual ringing at resonance and recover the wideband echo signal by bandpass filtering and cross-correlation in the frequency domain. The ToF was then determined after transforming back to the time domain. An array of pMUTs with resonance frequencies around 1.1 MHz was pulsed at 500 kHz, and a 4.3m standard deviation in ranging resolution was achieved with a pulse repetition frequency (PRF) of over 2 kHz. This enables ultra-precise non-contact distance or vibration measurements within a low-profile form factor.

Koh, Y., Wai Choong, D.S., Chen, D.S.-., Goh, D.J., Ghosh, S., Sharma, J., et al. (2021). High Resolution, High Frequency Ultrasonic Ranging in Air with pMUTs. In IEEE International Ultrasonics Symposium, IUS (pp.1-4). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE Computer Society [10.1109/IUS52206.2021.9593707].

High Resolution, High Frequency Ultrasonic Ranging in Air with pMUTs

Savoia A. S.;
2021-01-01

Abstract

Ultrasonic ranging with piezoelectric micromachined ultrasonic transducers (pMUTs) can be used in applications such as robotic systems and industrial machinery for precise distance measurements. This work presents a technique of operating pMUTs below the resonance frequency to obtain a wide bandwidth for high resolution time-of-flight (ToF) ranging. Digital signal processing was performed to remove the residual ringing at resonance and recover the wideband echo signal by bandpass filtering and cross-correlation in the frequency domain. The ToF was then determined after transforming back to the time domain. An array of pMUTs with resonance frequencies around 1.1 MHz was pulsed at 500 kHz, and a 4.3m standard deviation in ranging resolution was achieved with a pulse repetition frequency (PRF) of over 2 kHz. This enables ultra-precise non-contact distance or vibration measurements within a low-profile form factor.
2021
978-1-6654-0355-9
Koh, Y., Wai Choong, D.S., Chen, D.S.-., Goh, D.J., Ghosh, S., Sharma, J., et al. (2021). High Resolution, High Frequency Ultrasonic Ranging in Air with pMUTs. In IEEE International Ultrasonics Symposium, IUS (pp.1-4). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE Computer Society [10.1109/IUS52206.2021.9593707].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/434267
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