We analyze and optimize the transmission of ultrasonic waves through the back-etched cavities of broadband PMUT arrays designed for medical imaging and non-destructive testing applications. We use a simple waveguide model to determine the acoustic impedance matching condition and investigate the effectiveness of the matching approach through Finite Element Modeling (FEM). We show that both the characteristic impedance and the finite elasticity of the cavity-filling material may affect the transducer bandwidth. The theoretical results are validated through electro-acoustic measurements carried out using 2MHz, 12-element, 2-D PMUT arrays.
Savoia, A.S., Giusti, D., Shaw, M.A., Ferrera, M., Quaglia, F. (2022). Ultrasound Transmission Through the Back Cavities of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Arrays. In IEEE International Ultrasonics Symposium, IUS (pp.1-4). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE Computer Society [10.1109/IUS54386.2022.9958888].
Ultrasound Transmission Through the Back Cavities of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Arrays
Savoia A. S.;
2022-01-01
Abstract
We analyze and optimize the transmission of ultrasonic waves through the back-etched cavities of broadband PMUT arrays designed for medical imaging and non-destructive testing applications. We use a simple waveguide model to determine the acoustic impedance matching condition and investigate the effectiveness of the matching approach through Finite Element Modeling (FEM). We show that both the characteristic impedance and the finite elasticity of the cavity-filling material may affect the transducer bandwidth. The theoretical results are validated through electro-acoustic measurements carried out using 2MHz, 12-element, 2-D PMUT arrays.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
