Microgrippers (MGs) are Micro ElectroMechanical System (MEMS) devices able to manipulate cells and micrometric objects. In order to carry out their functional characterization, a comparison between two electrostatic rotary comb-drives actuated prototypes with different geometries through an image analysis-based method is proposed. This study aims at evaluating and comparing the MGs displacement as a function of the supply voltage. The two investigated geometries are equipped with a single rotary comb-drive and a double rotary comb-drive actuation. MGs data have been collected through a trinocular optical microscope with a digital camera and processed by means of an algorithm implemented ad hoc in MATLAB. Based on the promising results obtained, further studies are going to be carried out by including other geometries and improving the experimental setup and implemented method.
Bocchetta, G., Fiori, G., Scorza, A., Belfiore, N.P., Sciuto, S.A. (2022). First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry. In 25th IMEKO TC-4 International Symposium on Measurement of Electrical Quantities, IMEKO TC-4 2022 and 23rd International Workshop on ADC and DAC Modelling and Testing, IWADC 2022 (pp.151-155). International Measurement Confederation (IMEKO).
First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry
Bocchetta G.
Investigation
;Fiori G.Writing – Review & Editing
;Scorza A.Project Administration
;Belfiore N. P.;Sciuto S. A.Supervision
2022-01-01
Abstract
Microgrippers (MGs) are Micro ElectroMechanical System (MEMS) devices able to manipulate cells and micrometric objects. In order to carry out their functional characterization, a comparison between two electrostatic rotary comb-drives actuated prototypes with different geometries through an image analysis-based method is proposed. This study aims at evaluating and comparing the MGs displacement as a function of the supply voltage. The two investigated geometries are equipped with a single rotary comb-drive and a double rotary comb-drive actuation. MGs data have been collected through a trinocular optical microscope with a digital camera and processed by means of an algorithm implemented ad hoc in MATLAB. Based on the promising results obtained, further studies are going to be carried out by including other geometries and improving the experimental setup and implemented method.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
