PMUT (Piezoelectric Micromachined Ultrasonic Transducers) can be used in a wide number of medical and industrial applications, from high-end ultrasound scanning which requires a large array of membranes and interconnects to the ASIC driver/receiver, to therapeutic ultrasound and energy delivery which require a small number of membranes/interconnects. Different packaging needs have been required during the development program for the characterisation of the PMUT devices and the requirements of the different prospective product niches. In this paper, the different packages designed, assembled, and used during the development of the PMUT from the first characterisation packages to the 1st prototype packages that will be used for high resolution ultrasound imaging customer samples are described.
Giusti, D., Gritti, A., Quaglia, F., Savoia, A.S., Sandoh, H., Klug, G., et al. (2023). Development of PMUT Array Packaging from Characterisation Prototypes to Customer Samples. In Proceedings - Electronic Components and Technology Conference (pp.1442-1449). 345 E 47TH ST, NEW YORK, NY 10017 USA : Institute of Electrical and Electronics Engineers Inc. [10.1109/ECTC51909.2023.00246].
Development of PMUT Array Packaging from Characterisation Prototypes to Customer Samples
Savoia A. S.;
2023-01-01
Abstract
PMUT (Piezoelectric Micromachined Ultrasonic Transducers) can be used in a wide number of medical and industrial applications, from high-end ultrasound scanning which requires a large array of membranes and interconnects to the ASIC driver/receiver, to therapeutic ultrasound and energy delivery which require a small number of membranes/interconnects. Different packaging needs have been required during the development program for the characterisation of the PMUT devices and the requirements of the different prospective product niches. In this paper, the different packages designed, assembled, and used during the development of the PMUT from the first characterisation packages to the 1st prototype packages that will be used for high resolution ultrasound imaging customer samples are described.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
