In this paper, we propose a novel piezoelectric micromachined ultrasonic transducer (PMUT) for airborne object detection, which provides high sensitivity compared to the conventional round-shaped PMUT structure. This paper reports the concepts, fabrication and characterization of the new structure. The proposed structure shows a 13.3% improvement in transmitting (TX) sensitivity compared to the conventional one.

Da, Z., Rocha, R.T., Savoia, A.S., Xu, C., Xu, T. (2024). Cantilever-Plate Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Airborne Applications with Enhanced Output and Linear Working Range. In Proceedings of IEEE Sensors (pp.1-4). 345 E 47TH ST, NEW YORK, NY 10017 USA : Institute of Electrical and Electronics Engineers Inc. [10.1109/SENSORS60989.2024.10784519].

Cantilever-Plate Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Airborne Applications with Enhanced Output and Linear Working Range

Savoia A. S.;
2024-01-01

Abstract

In this paper, we propose a novel piezoelectric micromachined ultrasonic transducer (PMUT) for airborne object detection, which provides high sensitivity compared to the conventional round-shaped PMUT structure. This paper reports the concepts, fabrication and characterization of the new structure. The proposed structure shows a 13.3% improvement in transmitting (TX) sensitivity compared to the conventional one.
2024
Da, Z., Rocha, R.T., Savoia, A.S., Xu, C., Xu, T. (2024). Cantilever-Plate Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Airborne Applications with Enhanced Output and Linear Working Range. In Proceedings of IEEE Sensors (pp.1-4). 345 E 47TH ST, NEW YORK, NY 10017 USA : Institute of Electrical and Electronics Engineers Inc. [10.1109/SENSORS60989.2024.10784519].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11590/510618
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