Comparative Evaluation of Mechanical Performance of pMUT with Different Membrane Diameters in PZT and ScAlN30%

This study presents a comprehensive vibrometric characterization of piezoelectric Micromachined Ultrasonic Transducers (pMUTs). Initially, Fast Fourier Transform (FFT) analysis was employed to identify the resonance frequencies of the pMUTs. Subsequently, signals at these resonance frequencies were utilized to measure the displacement and the Q-factor. The pMUTs shared a uniform design but varied in diameter, resulting in resonance frequencies ranging from 200 to 600 kHz. Additionally, a comparative analysis was conducted between two materials: PZT (Lead Zirconate Titanate) and ScAIN30% (Scandium Aluminum Nitride with 30% Scandium), both deposited via Physical Vapor Deposition (PV D). The key findings reveal that while both materials exhibit similar displacement trends, PZT consistently demonstrates displacement values approximately twice as high as those of ScAIN30%. This study provides valuable insights into the performance of pMUTs with varying resonance frequencies and materials, contributing to the advancement of ultrasonic transducer technology.